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Atomic collisions, elastic recombination, and thermal diffusion during thin-film growth from low-energy ion beams

Atomic collisions, elastic recombination, and thermal diffusion during thin-film growth from low-energy ion beams

저자

N. Herbots, O. Vancauwenberghe, O. C. Hellman, Y. C. Joo

저널 정보

Nuclear Instruments and Methods in Physics Research B59/60, 1991 http://dx.doi.org/10.1016/0168-583X(91)95233-4

출간연도

1991

N. Herbots, O. Vancauwenberghe, O. C. Hellman, Y. C. Joo, “Atomic collisions, elastic recombination, and thermal diffusion during thin-film growth from low-energy ion beams”, Nuclear Instruments and Methods in Physics Research B59/60, 1991 http://dx.doi.org/10.1016/0168-583X(91)95233-4