Hongik Kim¹, Unggi Kim¹, Deokgi Hong, Sungtae Kim, Seungwu Han, Young-Chang Joo*, and So-Yeon Lee*, “Bonding structure and dry etching characteristics in amorphous B-C-N films for hardmask applications”, Carbon, 2024, 226, 119218, DOI: https://doi.org/10.1016/j.carbon.2024.119218