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Copper Bonding Technology in Heterogeneous Integration

Copper Bonding Technology in Heterogeneous Integration

저자

Yoon‑Gu Lee¹, Michael McInerney, Young‑Chang Joo, In‑Suk Choi* and Sarah Eunkyung Kim*

저널 정보

Electronic Materials Letters, 2023, 20, 1-25

출간연도

2023

Yoon‑Gu Lee¹, Michael McInerney, Young‑Chang Joo, In‑Suk Choi* and Sarah Eunkyung Kim*, “Copper Bonding Technology in Heterogeneous Integration”. Electronic Materials Letters, 2023, 20, 1-25, DOI: 10.1007/s13391-023-00433-4.