바로가기 메뉴
본문 바로가기
푸터 바로가기
TOP

Effect of capping layer on hillock formation in thin Al films

Effect of capping layer on hillock formation in thin Al films

저자

K.-H. Jang , S.-J. Hwang , Y.-C. Joo

저널 정보

Met. Mater-Int. 14(2), pp. 147 (2008)

출간연도

2008

K.-H. Jang , S.-J. Hwang , Y.-C. Joo, “Effect of capping layer on hillock formation in thin Al films”, Met. Mater-Int. 14(2), pp. 147 (2008)