Home Effect of capping layer on hillock formation in thin Al films
저자
K.-H. Jang , S.-J. Hwang , Y.-C. Joo
저널 정보
Met. Mater-Int. 14(2), pp. 147 (2008)
출간연도
2008
링크
https://doi.org/10.3365/met.mat.2008.04.147
K.-H. Jang , S.-J. Hwang , Y.-C. Joo, “Effect of capping layer on hillock formation in thin Al films”, Met. Mater-Int. 14(2), pp. 147 (2008)