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Effect of film thickness and anealing temperature on hilloock distributions in pure Al films

Effect of film thickness and anealing temperature on hilloock distributions in pure Al films

저자

S.-J. Hwang, J.-H. Lee, C.-O. Jeung, and Y.-C. Joo

저널 정보

Scripta Mater. 56, pp.17 (2007).

출간연도

2007

S.-J. Hwang, J.-H. Lee, C.-O. Jeung, and Y.-C. Joo, “Effect of film thickness and anealing temperature on hilloock distributions in pure Al films”, Scripta Mater. 56, pp.17 (2007).