Sungtae Kim¹, Min-Woo Jeong¹, Kuntae Kim, Ung-gi Kim, Miyoung Kim, So-Yeon Lee * and Young-Chang Joo*, “Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system”. RSC Advances, 2023, 13(3), 2131–2139, DOI: 10.1039/d2ra06808g.