Home Effect of Nitrogen Implantation with Low Dose on Thermomechanical Properties and Microstructure of Ge2Sb2Te5 Films
저자
I.-M. Park, J.-K. Jung, T.-Y. Yang, Y.-C. Joo
저널 정보
Jap. J. Appl. Phys. 47(3), pp. 1491 (2008).
출간연도
2008
링크
https://iopscience.iop.org/article/10.1143/JJAP.47.1491
I.-M. Park, J.-K. Jung, T.-Y. Yang, Y.-C. Joo, “Effect of Nitrogen Implantation with Low Dose on Thermomechanical Properties and Microstructure of Ge2Sb2Te5 Films”, Jap. J. Appl. Phys. 47(3), pp. 1491 (2008).