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서울대학교 서울대학교 미세유연소자재료 연구실

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Effect of pore interconnection on Cu-diffusion-induced failures in porous spin-on low-k dielectrics

Effect of pore interconnection on Cu-diffusion-induced failures in porous spin-on low-k dielectrics

저자

S.-S. Hwang, H.-C. Lee, H.-W. Ro, D. Y. Yoon and Y.-C. Joo

저널 정보

Appl. Phys. Lett. 87, pp. 111915 (2005).

출간연도

2005

링크

https://pubs.aip.org/aip/apl/article-abstract/87/11/111915/328466/Effect-of-pore-interconnection-on-Cu-diffusion?redirectedFrom=fulltext

S.-S. Hwang, H.-C. Lee, H.-W. Ro, D. Y. Yoon and Y.-C. Joo, “Effect of pore interconnection on Cu-diffusion-induced failures in porous spin-on low-k dielectrics”, Appl. Phys. Lett. 87, pp. 111915 (2005).

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