바로가기 메뉴
본문 바로가기
푸터 바로가기

서울대학교 서울대학교 미세유연소자재료 연구실

사이트맵
TOP

Effect of pulsed electric fields on dielectric breakdown in Cu damascene interconnects

Effect of pulsed electric fields on dielectric breakdown in Cu damascene interconnects

저자

Han-Wool Yeon, Jun-young Song, Seung-Min Lim, and Young-Chang Joo

저널 정보

Applied Physics Express 8, 2015

출간연도

2015

링크

https://doi.org/10.7567/APEX.8.031502

Han-Wool Yeon, Jun-young Song, Seung-Min Lim, and Young-Chang Joo, “Effect of pulsed electric fields on dielectric breakdown in Cu damascene interconnects”, Applied Physics Express 8, 2015 https://doi.org/10.7567/APEX.8.031502

목록 보기