Home Electromigration-induced transgranular failure mechanisms in single-crystal aluminum interconnects
저자
Y. -C. Joo, C. V. Thompson
저널 정보
Journal of Applied Physics 81(9), 1997 doi: http://dx.doi.org/10.1063/1.364454
출간연도
1997
링크
http://dx.doi.org/10.1063/1.364454
Y. -C. Joo, C. V. Thompson, “Electromigration-induced transgranular failure mechanisms in single-crystal aluminum interconnects”, Journal of Applied Physics 81(9), 1997 doi: http://dx.doi.org/10.1063/1.364454