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Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement

Home Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement

Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement

저자

K.-S. Kim, Y.-C. Joo, K.-B. Kim, and J.-Y. Kwon

저널 정보

J. Appl. Phys. 100, pp. 063517 (2006).

출간연도

2006

링크

https://doi.org/10.1063/1.2353891

K.-S. Kim, Y.-C. Joo, K.-B. Kim, and J.-Y. Kwon, “Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement”, J. Appl. Phys. 100, pp. 063517 (2006).