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Improvements of mechanical fatigue reliability of Cu interconnects on flexible substrates through MoTi alloy under-layer

Improvements of mechanical fatigue reliability of Cu interconnects on flexible substrates through MoTi alloy under-layer

저자

Young-Joo Lee, Hae-A-Seul Shin, Dae-Hyun Nam, Han-Wool Yeon, Boae Nam, Kyoohee Woo, and Young-Chang Joo

저널 정보

Electronic Materials Letters 11(1) 2015

출간연도

2015

Young-Joo Lee, Hae-A-Seul Shin, Dae-Hyun Nam, Han-Wool Yeon, Boae Nam, Kyoohee Woo, and Young-Chang Joo, “Improvements of mechanical fatigue reliability of Cu interconnects on flexible substrates through MoTi alloy under-layer”, Electronic Materials Letters 11(1) 2015 DOI: 10.1007/s13391-014-4191-6.