M. -S. Yoon, Y. -J. Park, and Y.-C. Joo, “Impurity redistributions in electroplated Cu films during self-annealing”, Thin Solid Films 408, pp. 230-235 (2002).
저자
M. -S. Yoon, Y. -J. Park, and Y.-C. Joo
저널 정보
Thin Solid Films 408, pp. 230-235 (2002).
출간연도
2002
M. -S. Yoon, Y. -J. Park, and Y.-C. Joo, “Impurity redistributions in electroplated Cu films during self-annealing”, Thin Solid Films 408, pp. 230-235 (2002).