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Characterization of Thermal Conductance of Copper-to-Copper Bonded Interconnects with Metal Passivation for Three-Dimensional Integration

Characterization of Thermal Conductance of Copper-to-Copper Bonded Interconnects with Metal Passivation for Three-Dimensional Integration

저자

Hakjun Kim, Intae Kim, Wonsik Lee, Jae Young Hwang, Sarah Eunkyung Kim, Young-Chang Joo*, Hyejin Jang*

저널 정보

Electronic Materials Letters (2025)

출간연도

2025

Hakjun Kim, Intae Kim, Wonsik Lee, Jae Young Hwang, Sarah Eunkyung Kim, Young-Chang Joo*, Hyejin Jang*, “Characterization of Thermal Conductance of Copper-to-Copper Bonded Interconnects with Metal Passivation for Three-Dimensional Integration”, Electronic Materials Letters (2025), DOI: https://doi.org/10.1007/s13391-025-00591-7