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Interfacial Adhesion Energies of Uniformly Self‑Formed Cr2O3 Barriers for Advanced Co Interconnects

Interfacial Adhesion Energies of Uniformly Self‑Formed Cr2O3 Barriers for Advanced Co Interconnects

저자

Seongi Lee, Soon‑Gyu Hwang, Gahui Kim, Cheol Kim, Woobin Kwon, Young‑Bae Park, Young‑Chang Joo*

저널 정보

Electronic Materials Letters, 2022, 18, 447–455

출간연도

2022

Seongi Lee, Soon‑Gyu Hwang, Gahui Kim, Cheol Kim, Woobin Kwon, Young‑Bae Park, Young‑Chang Joo*, “Interfacial Adhesion Energies of Uniformly Self‑Formed Cr2O3 Barriers for Advanced Co Interconnects”. Electronic Materials Letters, 2022, 18, 447–455, DOI: 10.1007/s13391-022-00360-w