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Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches

Home Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches

Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches

저자

H. Kwon, S.-S. Jang, Y.-H. Park, T.-S. Kim, Y.-D. Kim, H.-J. Nam, Y.-C. Joo

저널 정보

J. Micromech. Microeng. 18(10), pp. 105010 (2008).

출간연도

2008

링크

http://doi.org/10.1088/0960-1317/18/10/105010

H. Kwon, S.-S. Jang, Y.-H. Park, T.-S. Kim, Y.-D. Kim, H.-J. Nam, Y.-C. Joo, “Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches”, J. Micromech. Microeng. 18(10), pp. 105010 (2008).