J.-M. Paik, I.-M. Park, K.-C. Park, and Y.-C. Joo, “Line Width Dependence of Grain Structure and Stress in Damascene Cu Lines for ULSI”, J. Appl. Phys. 99, pp 024509 (2006).
저자
J.-M. Paik, I.-M. Park, K.-C. Park, and Y.-C. Joo
저널 정보
J. Appl. Phys. 99, pp 024509 (2006).
출간연도
2006
J.-M. Paik, I.-M. Park, K.-C. Park, and Y.-C. Joo, “Line Width Dependence of Grain Structure and Stress in Damascene Cu Lines for ULSI”, J. Appl. Phys. 99, pp 024509 (2006).