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Relationship between Grain Structures and Texture of Damascene Cu Lines

Home Relationship between Grain Structures and Texture of Damascene Cu Lines

Home Relationship between Grain Structures and Texture of Damascene Cu Lines

Relationship between Grain Structures and Texture of Damascene Cu Lines

저자

J.-M.Paik, K.-C. Park, and Y.-C. Joo

저널 정보

J. Elec. Mat. l33, pp.48-52 (2004).

출간연도

2004

링크

https://link.springer.com/article/10.1007/s11664-004-0293-5

J.-M.Paik, K.-C. Park, and Y.-C. Joo, “Relationship between Grain Structures and Texture of Damascene Cu Lines”, J. Elec. Mat. l33, pp.48-52 (2004).