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Robust Co alloy design for Co interconnects using a self‑forming barrier layer

Robust Co alloy design for Co interconnects using a self‑forming barrier layer

저자

Cheol Kim, Geosan Kang, Youngran Jung, Ji‑Yong Kim, Gi‑Baek Lee, Deokgi Hong, Yoongu Lee, Soon‑Gyu Hwang, In‑Ho Jung, Young‑Chang Joo*

저널 정보

Scientific Reports, 2022, 12, 12291

출간연도

2022

Cheol Kim, Geosan Kang, Youngran Jung, Ji‑Yong Kim, Gi‑Baek Lee, Deokgi Hong, Yoongu Lee, Soon‑Gyu Hwang, In‑Ho Jung, Young‑Chang Joo*, “Robust Co alloy design for Co interconnects using a self‑forming barrier layer”. Scientific Reports, 2022, 12, 12291, DOI: 10.1038/s41598-022-16288-y