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Thermomechanical Properties and Mechanical Stresses of Ge2Sb2Te5 Films in Phase-Change Random Access Memory

Home Thermomechanical Properties and Mechanical Stresses of Ge2Sb2Te5 Films in Phase-Change Random Access Memory

Thermomechanical Properties and Mechanical Stresses of Ge2Sb2Te5 Films in Phase-Change Random Access Memory

저자

I.-M. Park, J.-K. Jung, S.-O. Ryu, K.-J. Choi, B.-G. Yu, Y.-B. Park, S.-M. Han, Y.-C. Joo

저널 정보

Thin Solid Films 517(2), pp. 848 (2008).

출간연도

2008

링크

https://doi.org/10.1016/j.tsf.2008.08.194

I.-M. Park, J.-K. Jung, S.-O. Ryu, K.-J. Choi, B.-G. Yu, Y.-B. Park, S.-M. Han, Y.-C. Joo, “Thermomechanical Properties and Mechanical Stresses of Ge2Sb2Te5 Films in Phase-Change Random Access Memory”, Thin Solid Films 517(2), pp. 848 (2008).