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Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects

Home Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects

Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects

저자

Han-Wool Yeon, Jun-Young Song, Seung-Min Lim, Jang-Yong Bae, Yuchul Hwang, and Young-Chang Joo

저널 정보

J. Microelectron. Packag. Soc. 21(4), 2014

출간연도

2014

링크

https://10.6117/kmeps.2014.21.4.111

Han-Wool Yeon, Jun-Young Song, Seung-Min Lim, Jang-Yong Bae, Yuchul Hwang, and Young-Chang Joo, “Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects”, J. Microelectron. Packag. Soc. 21(4), 2014 DOI : 10.6117/kmeps.2014.21.4.111.