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The Improvement of Electrical Characteristics of Inkjet-printed Cu films with Stress Relaxation during Thermal Treatment

The Improvement of Electrical Characteristics of Inkjet-printed Cu films with Stress Relaxation during Thermal Treatment

저자

Seol-Min Yi, and Young-Chang Joo

저널 정보

J. Microelectron. Packag. Soc. 21(4), 2014

출간연도

2014

Seol-Min Yi, and Young-Chang Joo, “The Improvement of Electrical Characteristics of Inkjet-printed Cu films with Stress Relaxation during Thermal Treatment”, J. Microelectron. Packag. Soc. 21(4), 2014 DOI : 10.6117/kmeps.2014.21.4.05